x position (µm), y position (µm), data value (µm)

0.000000		0.000000		-0.007003
0.000000		0.0781250		-0.001751
0.000000		0.156250		0.002126
0.000000		0.234375		0.007379
0.000000		0.312500		0.011381
0.000000		0.390625		0.015132
0.000000		0.468750		0.020635
0.000000		0.546875		0.025012
0.000000		0.625000		0.028264
0.000000		0.703125		0.032891
0.000000		0.781250		0.037018
0.000000		0.859375		0.040770
0.000000		0.937500		0.043896
0.000000		1.01563		-0.033266
0.000000		1.09375		-0.026388
0.000000		1.17188		-0.028014
0.000000		1.25000		-0.032516
0.000000		1.32813		-0.036893
0.000000		1.40625		-0.039519
0.000000		1.48438		-0.042646
0.000000		1.56250		-0.046148
0.000000		1.64063		-0.049399
0.000000		1.71875		-0.053401
0.000000		1.79688		-0.057028
0.000000		1.87500		-0.054402
0.000000		1.95313		-0.057778
0.000000		2.03125		-0.054527
0.000000		2.10938		-0.059654
0.000000		2.18750		-0.061905
0.000000		2.26563		-0.058404
0.000000		2.34375		-0.062030
0.000000		2.42188		-0.064406
0.000000		2.50000		-0.065532
0.000000		2.57813		-0.065407
0.000000		2.65625		-0.068784
0.000000		2.73438		-0.071910
0.000000		2.81250		-0.073786
0.000000		2.89063		-0.076412
0.000000		2.96875		-0.079539
0.000000		3.04688		-0.082290
0.000000		3.12500		-0.075162
0.000000		3.20313		-0.076787
0.000000		3.28125		-0.082415
0.000000		3.35938		-0.082040
0.000000		3.43750		-0.083416
0.000000		3.51563		-0.083166
0.000000		3.59375		-0.084291
0.000000		3.67188		-0.086542
0.000000		3.75000		-0.085417
0.000000		3.82813		-0.086417
0.000000		3.90625		-0.090544
0.000000		3.98438		-0.093796
0.000000		4.06250		-0.093170
0.000000		4.14063		-0.096297
0.000000		4.21875		-0.102175
0.000000		4.29688		-0.103676
0.000000		4.37500		-0.098798
0.000000		4.45313		-0.099048
0.000000		4.53125		-0.099924
0.000000		4.60938		-0.095672
0.000000		4.68750		-0.101925
0.000000		4.76563		-0.102175
0.000000		4.84375		-0.102050
0.000000		4.92188		-0.103050
0.000000		5.00000		-0.100674
0.000000		5.07813		-0.098048
0.000000		5.15625		-0.098423
0.000000		5.23438		-0.103175
0.000000		5.31250		-0.105677
0.000000		5.39063		-0.106802
0.000000		5.46875		-0.106302
0.000000		5.54688		-0.109053
0.000000		5.62500		-0.110679
0.000000		5.70313		-0.111429
0.000000		5.78125		-0.115932
0.000000		5.85938		-0.117682
0.000000		5.93750		-0.120309
0.000000		6.01563		-0.122435
0.000000		6.09375		-0.125186
0.000000		6.17188		-0.128438
0.000000		6.25000		-0.123560
0.000000		6.32813		-0.132064
0.000000		6.40625		-0.131314
0.000000		6.48438		-0.127437
0.000000		6.56250		-0.134566
0.000000		6.64063		-0.148072
0.000000		6.71875		-0.134816
0.000000		6.79688		-0.130564
0.000000		6.87500		-0.129563
0.000000		6.95313		-0.130439
0.000000		7.03125		-0.128688
0.000000		7.10938		-0.129063
0.000000		7.18750		-0.128313
0.000000		7.26563		-0.127687
0.000000		7.34375		-0.129188
0.000000		7.42188		-0.131814
0.000000		7.50000		-0.132315
0.000000		7.57813		-0.133940
0.000000		7.65625		-0.136567
0.000000		7.73438		-0.139568
0.000000		7.81250		-0.145321
0.000000		7.89063		-0.144195
0.000000		7.96875		-0.142945
0.000000		8.04688		-0.143945
0.000000		8.12500		-0.144946
0.000000		8.20313		-0.147822
0.000000		8.28125		-0.146697
0.000000		8.35938		-0.145196
0.000000		8.43750		-0.143445
0.000000		8.51563		-0.140819
0.000000		8.59375		-0.141194
0.000000		8.67188		-0.141944
0.000000		8.75000		-0.140819
0.000000		8.82813		-0.139318
0.000000		8.90625		-0.131814
0.000000		8.98438		-0.132315
0.000000		9.06250		-0.143820
0.000000		9.14063		-0.156576
0.000000		9.21875		-0.163705
0.000000		9.29688		-0.169458
0.000000		9.37500		-0.171459
0.000000		9.45313		-0.174960
0.000000		9.53125		-0.177962
0.000000		9.60938		-0.184965
0.000000		9.68750		-0.192844
0.000000		9.76563		-0.198597
0.000000		9.84375		-0.209852
0.000000		9.92188		-0.224610
0.000000		10.0000		-0.238241
0.000000		10.0781		-0.231738
0.000000		10.1563		-0.229737
0.000000		10.2344		-0.230237
0.000000		10.3125		-0.232989
0.000000		10.3906		-0.232989
0.000000		10.4688		-0.223359
0.000000		10.5469		-0.222233
0.000000		10.6250		-0.210978
0.000000		10.7031		-0.204350
0.000000		10.7813		-0.217981
0.000000		10.8594		-0.238116
0.000000		10.9375		-0.232739
0.000000		11.0156		-0.228862
0.000000		11.0938		-0.228862
0.000000		11.1719		-0.235990
0.000000		11.2500		-0.232739
0.000000		11.3281		-0.230613
0.000000		11.4063		-0.236866
0.000000		11.4844		-0.238867
0.000000		11.5625		-0.244494
0.000000		11.6406		-0.229987
0.000000		11.7188		-0.228361
0.000000		11.7969		-0.234740
0.000000		11.8750		-0.237991
0.000000		11.9531		-0.243494
0.000000		12.0313		-0.236365
0.000000		12.1094		-0.230237
0.000000		12.1875		-0.230487
0.000000		12.2656		-0.229612
0.000000		12.3438		-0.227736
0.000000		12.4219		-0.230362
0.000000		12.5000		-0.228612
0.000000		12.5781		-0.229737
0.000000		12.6563		-0.229237
0.000000		12.7344		-0.232989
0.000000		12.8125		-0.234239
0.000000		12.8906		-0.230863
0.000000		12.9688		-0.234364
0.000000		13.0469		-0.237116
0.000000		13.1250		-0.237991
0.000000		13.2031		-0.238491
0.000000		13.2813		-0.239367
0.000000		13.3594		-0.239367
0.000000		13.4375		-0.240993
0.000000		13.5156		-0.243744
0.000000		13.5938		-0.244619
0.000000		13.6719		-0.246745
0.000000		13.7500		-0.247371
0.000000		13.8281		-0.247996
0.000000		13.9063		-0.247371
0.000000		13.9844		-0.244619
0.000000		14.0625		-0.245120
0.000000		14.1406		-0.247246
0.000000		14.2188		-0.251623
0.000000		14.2969		-0.255750
0.000000		14.3750		-0.262003
0.000000		14.4531		-0.264379
0.000000		14.5313		-0.268881
0.000000		14.6094		-0.269381
0.000000		14.6875		-0.275009
0.000000		14.7656		-0.277135
0.000000		14.8438		-0.273759
0.000000		14.9219		-0.271007
0.000000		15.0000		-0.274759
0.000000		15.0781		-0.277761
0.000000		15.1563		-0.274509
0.000000		15.2344		-0.278136
0.000000		15.3125		-0.281763
0.000000		15.3906		-0.280012
0.000000		15.4688		-0.279261
0.000000		15.5469		-0.280887
0.000000		15.6250		-0.283388
0.000000		15.7031		-0.284389
0.000000		15.7813		-0.288641
0.000000		15.8594		-0.285139
0.000000		15.9375		-0.283889
0.000000		16.0156		-0.288141
0.000000		16.0938		-0.292518
0.000000		16.1719		-0.295144
0.000000		16.2500		-0.297270
0.000000		16.3281		-0.300397
0.000000		16.4063		-0.297645
0.000000		16.4844		-0.297645
0.000000		16.5625		-0.298646
0.000000		16.6406		-0.299896
0.000000		16.7188		-0.300647
0.000000		16.7969		-0.305899
0.000000		16.8750		-0.307025
0.000000		16.9531		-0.310151
0.000000		17.0313		-0.313528
0.000000		17.1094		-0.319531
0.000000		17.1875		-0.320406
0.000000		17.2656		-0.325659
0.000000		17.3438		-0.328535
0.000000		17.4219		-0.323908
0.000000		17.5000		-0.326284
0.000000		17.5781		-0.330661
0.000000		17.6563		-0.337039
0.000000		17.7344		-0.337540
0.000000		17.8125		-0.336914
0.000000		17.8906		-0.340041
0.000000		17.9688		-0.345669
0.000000		18.0469		-0.343918
0.000000		18.1250		-0.342542
0.000000		18.2031		-0.347169
0.000000		18.2813		-0.351296
0.000000		18.3594		-0.351922
0.000000		18.4375		-0.358425
0.000000		18.5156		-0.364303
0.000000		18.5938		-0.357550
0.000000		18.6719		-0.363052
0.000000		18.7500		-0.370181
0.000000		18.8281		-0.371306
0.000000		18.9063		-0.372932
0.000000		18.9844		-0.375433
0.000000		19.0625		-0.376559
0.000000		19.1406		-0.381311
0.000000		19.2188		-0.386314
0.000000		19.2969		-0.398444
0.000000		19.3750		-0.405448
0.000000		19.4531		-0.420080
0.000000		19.5313		-0.423332
0.000000		19.6094		-0.424957
0.000000		19.6875		-0.429585
0.000000		19.7656		-0.441465
0.000000		19.8438		-0.448844
0.000000		19.9219		-0.460350
0.0781250		0.000000		-0.008004
0.0781250		0.0781250		-0.003252
0.0781250		0.156250		0.000750
0.0781250		0.234375		0.006253
0.0781250		0.312500		0.010255
0.0781250		0.390625		0.014007
0.0781250		0.468750		0.019510
0.0781250		0.546875		0.024137
0.0781250		0.625000		0.027388
0.0781250		0.703125		0.032391
0.0781250		0.781250		0.036893
0.0781250		0.859375		0.040895
0.0781250		0.937500		0.044272
0.0781250		1.01563		-0.035267
0.0781250		1.09375		-0.026263
0.0781250		1.17188		-0.027889
0.0781250		1.25000		-0.033141
0.0781250		1.32813		-0.037018
0.0781250		1.40625		-0.041145
0.0781250		1.48438		-0.043396
0.0781250		1.56250		-0.046773
0.0781250		1.64063		-0.048899
0.0781250		1.71875		-0.052776
0.0781250		1.79688		-0.056403
0.0781250		1.87500		-0.052401
0.0781250		1.95313		-0.054902
0.0781250		2.03125		-0.052901
0.0781250		2.10938		-0.058153
0.0781250		2.18750		-0.060655
0.0781250		2.26563		-0.057153
0.0781250		2.34375		-0.058529
0.0781250		2.42188		-0.064406
0.0781250		2.50000		-0.065032
0.0781250		2.57813		-0.065532
0.0781250		2.65625		-0.070534
0.0781250		2.73438		-0.073536
0.0781250		2.81250		-0.076787
0.0781250		2.89063		-0.077163
0.0781250		2.96875		-0.079789
0.0781250		3.04688		-0.080664
0.0781250		3.12500		-0.074661
0.0781250		3.20313		-0.076537
0.0781250		3.28125		-0.080664
0.0781250		3.35938		-0.081040
0.0781250		3.43750		-0.083041
0.0781250		3.51563		-0.084416
0.0781250		3.59375		-0.085417
0.0781250		3.67188		-0.087418
0.0781250		3.75000		-0.084291
0.0781250		3.82813		-0.086917
0.0781250		3.90625		-0.089919
0.0781250		3.98438		-0.092920
0.0781250		4.06250		-0.093170
0.0781250		4.14063		-0.097548
0.0781250		4.21875		-0.105802
0.0781250		4.29688		-0.107552
0.0781250		4.37500		-0.103175
0.0781250		4.45313		-0.101675
0.0781250		4.53125		-0.101675
0.0781250		4.60938		-0.097798
0.0781250		4.68750		-0.103300
0.0781250		4.76563		-0.103425
0.0781250		4.84375		-0.101925
0.0781250		4.92188		-0.102425
0.0781250		5.00000		-0.101550
0.0781250		5.07813		-0.098298
0.0781250		5.15625		-0.098673
0.0781250		5.23438		-0.103175
0.0781250		5.31250		-0.106052
0.0781250		5.39063		-0.108178
0.0781250		5.46875		-0.106802
0.0781250		5.54688		-0.108928
0.0781250		5.62500		-0.111805
0.0781250		5.70313		-0.112305
0.0781250		5.78125		-0.113180
0.0781250		5.85938		-0.113555
0.0781250		5.93750		-0.115807
0.0781250		6.01563		-0.118058
0.0781250		6.09375		-0.120559
0.0781250		6.17188		-0.125561
0.0781250		6.25000		-0.119934
0.0781250		6.32813		-0.125811
0.0781250		6.40625		-0.125561
0.0781250		6.48438		-0.124436
0.0781250		6.56250		-0.130814
0.0781250		6.64063		-0.144571
0.0781250		6.71875		-0.133940
0.0781250		6.79688		-0.130063
0.0781250		6.87500		-0.127937
0.0781250		6.95313		-0.129438
0.0781250		7.03125		-0.128063
0.0781250		7.10938		-0.128563
0.0781250		7.18750		-0.126937
0.0781250		7.26563		-0.126687
0.0781250		7.34375		-0.127562
0.0781250		7.42188		-0.131689
0.0781250		7.50000		-0.132440
0.0781250		7.57813		-0.134316
0.0781250		7.65625		-0.136817
0.0781250		7.73438		-0.138443
0.0781250		7.81250		-0.144571
0.0781250		7.89063		-0.144571
0.0781250		7.96875		-0.142945
0.0781250		8.04688		-0.144320
0.0781250		8.12500		-0.145696
0.0781250		8.20313		-0.148948
0.0781250		8.28125		-0.148573
0.0781250		8.35938		-0.145821
0.0781250		8.43750		-0.143570
0.0781250		8.51563		-0.142069
0.0781250		8.59375		-0.142945
0.0781250		8.67188		-0.142695
0.0781250		8.75000		-0.141569
0.0781250		8.82813		-0.136942
0.0781250		8.90625		-0.125061
0.0781250		8.98438		-0.125311
0.0781250		9.06250		-0.141444
0.0781250		9.14063		-0.158828
0.0781250		9.21875		-0.166206
0.0781250		9.29688		-0.173335
0.0781250		9.37500		-0.176086
0.0781250		9.45313		-0.174210
0.0781250		9.53125		-0.177837
0.0781250		9.60938		-0.184215
0.0781250		9.68750		-0.192094
0.0781250		9.76563		-0.200223
0.0781250		9.84375		-0.213729
0.0781250		9.92188		-0.232614
0.0781250		10.0000		-0.235115
0.0781250		10.0781		-0.231363
0.0781250		10.1563		-0.235115
0.0781250		10.2344		-0.234740
0.0781250		10.3125		-0.238241
0.0781250		10.3906		-0.234990
0.0781250		10.4688		-0.225485
0.0781250		10.5469		-0.224359
0.0781250		10.6250		-0.212979
0.0781250		10.7031		-0.214230
0.0781250		10.7813		-0.225110
0.0781250		10.8594		-0.240617
0.0781250		10.9375		-0.232113
0.0781250		11.0156		-0.233364
0.0781250		11.0938		-0.231113
0.0781250		11.1719		-0.240993
0.0781250		11.2500		-0.234489
0.0781250		11.3281		-0.230738
0.0781250		11.4063		-0.235615
0.0781250		11.4844		-0.239367
0.0781250		11.5625		-0.244744
0.0781250		11.6406		-0.230112
0.0781250		11.7188		-0.230487
0.0781250		11.7969		-0.236866
0.0781250		11.8750		-0.241493
0.0781250		11.9531		-0.244619
0.0781250		12.0313		-0.234865
0.0781250		12.1094		-0.230487
0.0781250		12.1875		-0.230863
0.0781250		12.2656		-0.231113
0.0781250		12.3438		-0.228862
0.0781250		12.4219		-0.230738
0.0781250		12.5000		-0.228487
0.0781250		12.5781		-0.230863
0.0781250		12.6563		-0.229362
0.0781250		12.7344		-0.233239
0.0781250		12.8125		-0.233989
0.0781250		12.8906		-0.233614
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3.12500		8.04688		-0.140694
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11.2500		10.7813		-0.193469
11.2500		10.8594		-0.203224
11.2500		10.9375		-0.208352
11.2500		11.0156		-0.213604
11.2500		11.0938		-0.222108
11.2500		11.1719		-0.219357
11.2500		11.2500		-0.229362
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11.2500		11.4063		-0.235990
11.2500		11.4844		-0.237366
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11.2500		12.1875		-0.271758
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11.2500		12.5000		-0.274384
11.2500		12.5781		-0.283138
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11.2500		12.8125		-0.298896
11.2500		12.8906		-0.313528
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11.2500		13.2031		-0.290392
11.2500		13.2813		-0.288141
11.2500		13.3594		-0.293643
11.2500		13.4375		-0.295144
11.2500		13.5156		-0.298771
11.2500		13.5938		-0.297645
11.2500		13.6719		-0.290517
11.2500		13.7500		-0.291892
11.2500		13.8281		-0.293268
11.2500		13.9063		-0.292643
11.2500		13.9844		-0.284139
11.2500		14.0625		-0.288766
11.2500		14.1406		-0.280137
11.2500		14.2188		-0.278761
11.2500		14.2969		-0.273508
11.2500		14.3750		-0.287140
11.2500		14.4531		-0.281137
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11.2500		14.6094		-0.279386
11.2500		14.6875		-0.278386
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11.2500		14.8438		-0.275635
11.2500		14.9219		-0.270007
11.2500		15.0000		-0.268506
11.2500		15.0781		-0.261002
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11.2500		15.2344		-0.256625
11.2500		15.3125		-0.265880
11.2500		15.3906		-0.260752
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11.2500		15.5469		-0.270382
11.2500		15.6250		-0.274384
11.2500		15.7031		-0.275885
11.2500		15.7813		-0.276510
11.2500		15.8594		-0.268381
11.2500		15.9375		-0.258626
11.2500		16.0156		-0.252998
11.2500		16.0938		-0.255375
11.2500		16.1719		-0.255500
11.2500		16.2500		-0.258876
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11.2500		16.4063		-0.259877
11.2500		16.4844		-0.269507
11.2500		16.5625		-0.273634
11.2500		16.6406		-0.281637
11.2500		16.7188		-0.288391
11.2500		16.7969		-0.301647
11.2500		16.8750		-0.293518
11.2500		16.9531		-0.286390
11.2500		17.0313		-0.286015
11.2500		17.1094		-0.288266
11.2500		17.1875		-0.286140
11.2500		17.2656		-0.285639
11.2500		17.3438		-0.284264
11.2500		17.4219		-0.290892
11.2500		17.5000		-0.298146
11.2500		17.5781		-0.309776
11.2500		17.6563		-0.312277
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11.2500		17.8125		-0.320156
11.2500		17.8906		-0.332787
11.2500		17.9688		-0.335539
11.2500		18.0469		-0.332537
11.2500		18.1250		-0.340041
11.2500		18.2031		-0.343918
11.2500		18.2813		-0.340541
11.2500		18.3594		-0.355048
11.2500		18.4375		-0.352297
11.2500		18.5156		-0.357049
11.2500		18.5938		-0.363302
11.2500		18.6719		-0.366179
11.2500		18.7500		-0.370556
11.2500		18.8281		-0.373182
11.2500		18.9063		-0.378435
11.2500		18.9844		-0.386063
11.2500		19.0625		-0.392316
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11.2500		19.2188		-0.410325
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11.3281		0.390625		-0.007879
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11.3281		0.625000		0.009004
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11.3281		0.859375		0.026013
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11.3281		1.25000		0.050275
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11.3281		1.87500		0.029264
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11.3281		9.06250		-0.097297
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11.3281		10.0000		-0.160328
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11.3281		10.3125		-0.180838
11.3281		10.3906		-0.178087
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11.3281		10.6250		-0.186591
11.3281		10.7031		-0.190343
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11.3281		10.9375		-0.207851
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11.3281		11.2500		-0.233614
11.3281		11.3281		-0.227861
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11.3281		11.4844		-0.239492
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11.3281		12.5000		-0.274384
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11.3281		12.8906		-0.311402
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11.3281		13.2031		-0.291892
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11.3281		13.5156		-0.300647
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11.3281		13.7500		-0.293893
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11.3281		13.9844		-0.285139
11.3281		14.0625		-0.289266
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11.3281		14.2969		-0.278636
11.3281		14.3750		-0.289891
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11.3281		14.6875		-0.284514
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11.3281		15.0000		-0.266505
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11.4063		1.71875		0.023511
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11.4063		3.82813		-0.097798
11.4063		3.90625		-0.105426
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12.6563		11.5625		-0.231488
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17.5000		17.1875		-0.278636
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17.5000		17.5000		-0.307900
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17.5000		18.0469		-0.288641
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17.6563		9.06250		-0.132815
17.6563		9.14063		-0.127687
17.6563		9.21875		-0.113430
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19.9219		17.5000		-0.245995
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19.9219		18.3594		-0.279011
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19.9219		18.5938		-0.287891
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19.9219		18.7500		-0.306525
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