x position (µm), y position (µm), data value (µm)

0.000000		0.000000		-0.976101
0.000000		0.0781250		-0.976477
0.000000		0.156250		-0.978102
0.000000		0.234375		-0.978102
0.000000		0.312500		-0.969848
0.000000		0.390625		-0.968723
0.000000		0.468750		-0.959593
0.000000		0.546875		-0.957717
0.000000		0.625000		-0.956717
0.000000		0.703125		-0.952715
0.000000		0.781250		-0.959468
0.000000		0.859375		-0.958343
0.000000		0.937500		-0.960344
0.000000		1.01563		-0.959969
0.000000		1.09375		-0.961219
0.000000		1.17188		-0.961844
0.000000		1.25000		-0.938583
0.000000		1.32813		-0.938833
0.000000		1.40625		-0.943711
0.000000		1.48438		-0.947337
0.000000		1.56250		-0.945837
0.000000		1.64063		-0.949839
0.000000		1.71875		-0.946712
0.000000		1.79688		-0.947462
0.000000		1.87500		-0.951589
0.000000		1.95313		-0.957092
0.000000		2.03125		-0.945461
0.000000		2.10938		-0.935707
0.000000		2.18750		-0.933080
0.000000		2.26563		-0.932205
0.000000		2.34375		-0.934831
0.000000		2.42188		-0.931330
0.000000		2.50000		-0.931705
0.000000		2.57813		-0.929579
0.000000		2.65625		-0.924826
0.000000		2.73438		-0.925702
0.000000		2.81250		-0.926327
0.000000		2.89063		-0.929204
0.000000		2.96875		-0.927203
0.000000		3.04688		-0.927453
0.000000		3.12500		-0.925327
0.000000		3.20313		-0.909444
0.000000		3.28125		-0.910444
0.000000		3.35938		-0.905192
0.000000		3.43750		-0.902691
0.000000		3.51563		-0.898188
0.000000		3.59375		-0.892811
0.000000		3.67188		-0.893936
0.000000		3.75000		-0.894687
0.000000		3.82813		-0.889559
0.000000		3.90625		-0.905567
0.000000		3.98438		-0.890935
0.000000		4.06250		-0.887183
0.000000		4.14063		-0.888058
0.000000		4.21875		-0.885682
0.000000		4.29688		-0.887808
0.000000		4.37500		-0.882431
0.000000		4.45313		-0.876553
0.000000		4.53125		-0.881055
0.000000		4.60938		-0.882431
0.000000		4.68750		-0.876428
0.000000		4.76563		-0.865172
0.000000		4.84375		-0.858044
0.000000		4.92188		-0.847289
0.000000		5.00000		-0.841661
0.000000		5.07813		-0.847539
0.000000		5.15625		-0.845162
0.000000		5.23438		-0.847539
0.000000		5.31250		-0.846163
0.000000		5.39063		-0.838784
0.000000		5.46875		-0.844912
0.000000		5.54688		-0.833282
0.000000		5.62500		-0.831906
0.000000		5.70313		-0.827904
0.000000		5.78125		-0.824903
0.000000		5.85938		-0.822777
0.000000		5.93750		-0.819150
0.000000		6.01563		-0.812021
0.000000		6.09375		-0.811521
0.000000		6.17188		-0.810521
0.000000		6.25000		-0.805893
0.000000		6.32813		-0.807144
0.000000		6.40625		-0.799765
0.000000		6.48438		-0.795638
0.000000		6.56250		-0.791261
0.000000		6.64063		-0.795013
0.000000		6.71875		-0.801891
0.000000		6.79688		-0.801891
0.000000		6.87500		-0.807144
0.000000		6.95313		-0.797639
0.000000		7.03125		-0.792512
0.000000		7.10938		-0.796889
0.000000		7.18750		-0.787384
0.000000		7.26563		-0.792137
0.000000		7.34375		-0.793387
0.000000		7.42188		-0.787134
0.000000		7.50000		-0.789135
0.000000		7.57813		-0.772127
0.000000		7.65625		-0.776879
0.000000		7.73438		-0.766374
0.000000		7.81250		-0.769000
0.000000		7.89063		-0.764998
0.000000		7.96875		-0.760371
0.000000		8.04688		-0.763623
0.000000		8.12500		-0.760996
0.000000		8.20313		-0.762747
0.000000		8.28125		-0.770501
0.000000		8.35938		-0.770626
0.000000		8.43750		-0.770876
0.000000		8.51563		-0.776879
0.000000		8.59375		-0.763748
0.000000		8.67188		-0.765999
0.000000		8.75000		-0.765499
0.000000		8.82813		-0.755119
0.000000		8.90625		-0.761872
0.000000		8.98438		-0.760871
0.000000		9.06250		-0.760621
0.000000		9.14063		-0.759621
0.000000		9.21875		-0.759996
0.000000		9.29688		-0.763748
0.000000		9.37500		-0.764498
0.000000		9.45313		-0.750616
0.000000		9.53125		-0.750116
0.000000		9.60938		-0.761872
0.000000		9.68750		-0.762747
0.000000		9.76563		-0.749991
0.000000		9.84375		-0.746364
0.000000		9.92188		-0.752242
0.000000		10.0000		-0.755119
0.000000		10.0781		-0.749366
0.000000		10.1563		-0.752742
0.000000		10.2344		-0.745739
0.000000		10.3125		-0.732733
0.000000		10.3906		-0.719351
0.000000		10.4688		-0.713223
0.000000		10.5469		-0.712223
0.000000		10.6250		-0.710972
0.000000		10.7031		-0.704219
0.000000		10.7813		-0.697590
0.000000		10.8594		-0.694714
0.000000		10.9375		-0.689837
0.000000		11.0156		-0.685460
0.000000		11.0938		-0.687210
0.000000		11.1719		-0.688086
0.000000		11.2500		-0.686335
0.000000		11.3281		-0.676455
0.000000		11.4063		-0.665450
0.000000		11.4844		-0.667201
0.000000		11.5625		-0.658696
0.000000		11.6406		-0.652193
0.000000		11.7188		-0.649942
0.000000		11.7969		-0.642564
0.000000		11.8750		-0.637436
0.000000		11.9531		-0.647566
0.000000		12.0313		-0.643064
0.000000		12.1094		-0.648692
0.000000		12.1875		-0.683459
0.000000		12.2656		-0.673579
0.000000		12.3438		-0.671828
0.000000		12.4219		-0.649442
0.000000		12.5000		-0.634059
0.000000		12.5781		-0.628932
0.000000		12.6563		-0.637311
0.000000		12.7344		-0.634810
0.000000		12.8125		-0.633809
0.000000		12.8906		-0.632934
0.000000		12.9688		-0.624055
0.000000		13.0469		-0.628682
0.000000		13.1250		-0.627806
0.000000		13.2031		-0.622554
0.000000		13.2813		-0.627181
0.000000		13.3594		-0.617676
0.000000		13.4375		-0.618552
0.000000		13.5156		-0.625930
0.000000		13.5938		-0.633434
0.000000		13.6719		-0.630433
0.000000		13.7500		-0.614800
0.000000		13.8281		-0.610798
0.000000		13.9063		-0.610173
0.000000		13.9844		-0.614925
0.000000		14.0625		-0.603294
0.000000		14.1406		-0.598542
0.000000		14.2188		-0.599418
0.000000		14.2969		-0.592789
0.000000		14.3750		-0.592414
0.000000		14.4531		-0.593164
0.000000		14.5313		-0.589288
0.000000		14.6094		-0.583535
0.000000		14.6875		-0.585411
0.000000		14.7656		-0.580909
0.000000		14.8438		-0.579408
0.000000		14.9219		-0.591539
0.000000		15.0000		-0.582409
0.000000		15.0781		-0.575031
0.000000		15.1563		-0.583910
0.000000		15.2344		-0.593665
0.000000		15.3125		-0.579783
0.000000		15.3906		-0.575031
0.000000		15.4688		-0.576031
0.000000		15.5469		-0.557397
0.000000		15.6250		-0.562525
0.000000		15.7031		-0.562399
0.000000		15.7813		-0.566902
0.000000		15.8594		-0.569903
0.000000		15.9375		-0.576281
0.000000		16.0156		-0.576031
0.000000		16.0938		-0.567902
0.000000		16.1719		-0.557022
0.000000		16.2500		-0.549518
0.000000		16.3281		-0.548017
0.000000		16.4063		-0.561024
0.000000		16.4844		-0.555896
0.000000		16.5625		-0.553395
0.000000		16.6406		-0.554145
0.000000		16.7188		-0.556522
0.000000		16.7969		-0.549518
0.000000		16.8750		-0.546517
0.000000		16.9531		-0.540764
0.000000		17.0313		-0.544266
0.000000		17.1094		-0.547642
0.000000		17.1875		-0.542390
0.000000		17.2656		-0.536137
0.000000		17.3438		-0.532010
0.000000		17.4219		-0.527007
0.000000		17.5000		-0.526007
0.000000		17.5781		-0.522380
0.000000		17.6563		-0.520879
0.000000		17.7344		-0.523881
0.000000		17.8125		-0.522255
0.000000		17.8906		-0.517002
0.000000		17.9688		-0.508748
0.000000		18.0469		-0.510999
0.000000		18.1250		-0.508998
0.000000		18.2031		-0.508748
0.000000		18.2813		-0.508998
0.000000		18.3594		-0.507248
0.000000		18.4375		-0.504121
0.000000		18.5156		-0.501620
0.000000		18.5938		-0.499244
0.000000		18.6719		-0.499619
0.000000		18.7500		-0.499369
0.000000		18.8281		-0.499244
0.000000		18.9063		-0.499369
0.000000		18.9844		-0.500619
0.000000		19.0625		-0.500244
0.000000		19.1406		-0.498868
0.000000		19.2188		-0.469229
0.000000		19.2969		-0.470229
0.000000		19.3750		-0.470730
0.000000		19.4531		-0.473106
0.000000		19.5313		-0.474607
0.000000		19.6094		-0.469604
0.000000		19.6875		-0.473856
0.000000		19.7656		-0.477233
0.000000		19.8438		-0.478358
0.000000		19.9219		-0.478984
0.0781250		0.000000		-0.983105
0.0781250		0.0781250		-0.979478
0.0781250		0.156250		-0.980854
0.0781250		0.234375		-0.981354
0.0781250		0.312500		-0.971724
0.0781250		0.390625		-0.963470
0.0781250		0.468750		-0.957717
0.0781250		0.546875		-0.958843
0.0781250		0.625000		-0.960094
0.0781250		0.703125		-0.955466
0.0781250		0.781250		-0.960594
0.0781250		0.859375		-0.959093
0.0781250		0.937500		-0.962720
0.0781250		1.01563		-0.961594
0.0781250		1.09375		-0.963345
0.0781250		1.17188		-0.961969
0.0781250		1.25000		-0.940709
0.0781250		1.32813		-0.942585
0.0781250		1.40625		-0.947462
0.0781250		1.48438		-0.945086
0.0781250		1.56250		-0.944211
0.0781250		1.64063		-0.946462
0.0781250		1.71875		-0.950214
0.0781250		1.79688		-0.955341
0.0781250		1.87500		-0.951089
0.0781250		1.95313		-0.952840
0.0781250		2.03125		-0.942210
0.0781250		2.10938		-0.933956
0.0781250		2.18750		-0.933456
0.0781250		2.26563		-0.935331
0.0781250		2.34375		-0.934956
0.0781250		2.42188		-0.933706
0.0781250		2.50000		-0.934831
0.0781250		2.57813		-0.933080
0.0781250		2.65625		-0.926452
0.0781250		2.73438		-0.928453
0.0781250		2.81250		-0.928578
0.0781250		2.89063		-0.930204
0.0781250		2.96875		-0.927077
0.0781250		3.04688		-0.928578
0.0781250		3.12500		-0.922950
0.0781250		3.20313		-0.910820
0.0781250		3.28125		-0.912195
0.0781250		3.35938		-0.904191
0.0781250		3.43750		-0.903191
0.0781250		3.51563		-0.901440
0.0781250		3.59375		-0.896062
0.0781250		3.67188		-0.896938
0.0781250		3.75000		-0.887808
0.0781250		3.82813		-0.891310
0.0781250		3.90625		-0.906442
0.0781250		3.98438		-0.897438
0.0781250		4.06250		-0.892811
0.0781250		4.14063		-0.891935
0.0781250		4.21875		-0.887308
0.0781250		4.29688		-0.884932
0.0781250		4.37500		-0.880430
0.0781250		4.45313		-0.878054
0.0781250		4.53125		-0.878679
0.0781250		4.60938		-0.879554
0.0781250		4.68750		-0.876678
0.0781250		4.76563		-0.870175
0.0781250		4.84375		-0.862671
0.0781250		4.92188		-0.850540
0.0781250		5.00000		-0.842911
0.0781250		5.07813		-0.844037
0.0781250		5.15625		-0.845162
0.0781250		5.23438		-0.844662
0.0781250		5.31250		-0.846663
0.0781250		5.39063		-0.836283
0.0781250		5.46875		-0.842911
0.0781250		5.54688		-0.840160
0.0781250		5.62500		-0.839785
0.0781250		5.70313		-0.840285
0.0781250		5.78125		-0.834782
0.0781250		5.85938		-0.826403
0.0781250		5.93750		-0.826153
0.0781250		6.01563		-0.822276
0.0781250		6.09375		-0.819025
0.0781250		6.17188		-0.807644
0.0781250		6.25000		-0.801891
0.0781250		6.32813		-0.798014
0.0781250		6.40625		-0.794888
0.0781250		6.48438		-0.798765
0.0781250		6.56250		-0.793137
0.0781250		6.64063		-0.793137
0.0781250		6.71875		-0.792387
0.0781250		6.79688		-0.795388
0.0781250		6.87500		-0.802016
0.0781250		6.95313		-0.793887
0.0781250		7.03125		-0.785258
0.0781250		7.10938		-0.778880
0.0781250		7.18750		-0.774128
0.0781250		7.26563		-0.779005
0.0781250		7.34375		-0.786884
0.0781250		7.42188		-0.782757
0.0781250		7.50000		-0.787759
0.0781250		7.57813		-0.772127
0.0781250		7.65625		-0.779631
0.0781250		7.73438		-0.768500
0.0781250		7.81250		-0.773503
0.0781250		7.89063		-0.773377
0.0781250		7.96875		-0.769125
0.0781250		8.04688		-0.771376
0.0781250		8.12500		-0.768500
0.0781250		8.20313		-0.769250
0.0781250		8.28125		-0.778005
0.0781250		8.35938		-0.777254
0.0781250		8.43750		-0.778380
0.0781250		8.51563		-0.781506
0.0781250		8.59375		-0.774753
0.0781250		8.67188		-0.773127
0.0781250		8.75000		-0.771627
0.0781250		8.82813		-0.761997
0.0781250		8.90625		-0.767249
0.0781250		8.98438		-0.765248
0.0781250		9.06250		-0.763998
0.0781250		9.14063		-0.762997
0.0781250		9.21875		-0.762372
0.0781250		9.29688		-0.763122
0.0781250		9.37500		-0.762747
0.0781250		9.45313		-0.750491
0.0781250		9.53125		-0.749491
0.0781250		9.60938		-0.755744
0.0781250		9.68750		-0.751242
0.0781250		9.76563		-0.745739
0.0781250		9.84375		-0.742988
0.0781250		9.92188		-0.747740
0.0781250		10.0000		-0.754993
0.0781250		10.0781		-0.749116
0.0781250		10.1563		-0.744989
0.0781250		10.2344		-0.737735
0.0781250		10.3125		-0.722728
0.0781250		10.3906		-0.710722
0.0781250		10.4688		-0.708346
0.0781250		10.5469		-0.705719
0.0781250		10.6250		-0.698091
0.0781250		10.7031		-0.696715
0.0781250		10.7813		-0.691462
0.0781250		10.8594		-0.693213
0.0781250		10.9375		-0.689962
0.0781250		11.0156		-0.682083
0.0781250		11.0938		-0.679081
0.0781250		11.1719		-0.684459
0.0781250		11.2500		-0.687586
0.0781250		11.3281		-0.681833
0.0781250		11.4063		-0.669827
0.0781250		11.4844		-0.673078
0.0781250		11.5625		-0.672453
0.0781250		11.6406		-0.658446
0.0781250		11.7188		-0.650693
0.0781250		11.7969		-0.642939
0.0781250		11.8750		-0.638437
0.0781250		11.9531		-0.638562
0.0781250		12.0313		-0.636811
0.0781250		12.1094		-0.661573
0.0781250		12.1875		-0.669202
0.0781250		12.2656		-0.659572
0.0781250		12.3438		-0.671953
0.0781250		12.4219		-0.665950
0.0781250		12.5000		-0.634810
0.0781250		12.5781		-0.627431
0.0781250		12.6563		-0.640187
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3.20313		13.3594		-0.617426
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11.1719		5.00000		-0.887683
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11.2500		13.9844		-0.630933
11.2500		14.0625		-0.610173
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11.2500		14.8438		-0.589663
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11.2500		15.0000		-0.592039
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11.2500		15.6250		-0.558523
11.2500		15.7031		-0.557897
11.2500		15.7813		-0.558898
11.2500		15.8594		-0.560023
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11.2500		16.0156		-0.562024
11.2500		16.0938		-0.564400
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11.2500		16.2500		-0.562149
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11.2500		16.4844		-0.557522
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11.2500		16.6406		-0.562274
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11.2500		17.5000		-0.543765
11.2500		17.5781		-0.539388
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11.3281		1.56250		-0.937583
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11.3281		1.71875		-0.939584
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11.3281		1.87500		-0.932205
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11.3281		2.50000		-0.916822
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11.3281		2.96875		-0.912946
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11.3281		3.12500		-0.903691
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11.3281		3.75000		-0.920199
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11.3281		3.90625		-0.908944
11.3281		3.98438		-0.909194
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11.3281		4.14063		-0.909444
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11.3281		5.00000		-0.897563
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11.3281		12.5000		-0.658696
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11.3281		13.4375		-0.634310
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11.3281		14.3750		-0.607296
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11.3281		15.0000		-0.592914
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11.3281		15.8594		-0.564025
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11.4063		1.25000		-0.936707
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11.4063		1.56250		-0.939333
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11.4063		2.96875		-0.912695
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11.4063		5.00000		-0.896187
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11.4063		6.48438		-0.812772
11.4063		6.56250		-0.810896
11.4063		6.64063		-0.806018
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11.4063		6.87500		-0.811396
11.4063		6.95313		-0.808770
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11.4063		7.34375		-0.805393
11.4063		7.42188		-0.803017
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11.4063		7.65625		-0.770001
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11.4063		7.81250		-0.768250
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11.4063		7.96875		-0.767875
11.4063		8.04688		-0.766249
11.4063		8.12500		-0.767500
11.4063		8.20313		-0.767750
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12.6563		12.1094		-0.684334
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16.1719		19.6875		-0.503871
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16.1719		19.8438		-0.493616
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16.2500		0.625000		-0.973100
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16.2500		1.64063		-0.934831
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16.2500		2.34375		-0.906067
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16.2500		2.50000		-0.901440
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16.2500		3.04688		-0.914446
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16.2500		5.00000		-0.865047
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16.3281		1.56250		-0.935832
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16.3281		2.50000		-0.913821
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16.3281		10.0000		-0.734358
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16.3281		10.7031		-0.682833
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17.1875		17.5000		-0.531134
17.1875		17.5781		-0.525256
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17.1875		19.2969		-0.509999
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17.2656		0.625000		-0.980479
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17.2656		1.01563		-0.962345
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17.2656		1.40625		-0.935832
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17.2656		1.56250		-0.933080
17.2656		1.64063		-0.933956
17.2656		1.71875		-0.931830
17.2656		1.79688		-0.931330
17.2656		1.87500		-0.927203
17.2656		1.95313		-0.926577
17.2656		2.03125		-0.924576
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17.2656		2.50000		-0.909944
17.2656		2.57813		-0.907443
17.2656		2.65625		-0.908193
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17.2656		2.81250		-0.907068
17.2656		2.89063		-0.906567
17.2656		2.96875		-0.908443
17.2656		3.04688		-0.913821
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17.2656		3.51563		-0.887808
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17.2656		3.75000		-0.879429
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17.2656		3.90625		-0.880930
17.2656		3.98438		-0.877553
17.2656		4.06250		-0.878804
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17.2656		4.29688		-0.872551
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17.2656		4.45313		-0.872301
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17.2656		4.60938		-0.872801
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17.2656		5.00000		-0.848914
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17.3438		1.71875		-0.929829
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17.3438		2.50000		-0.908693
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17.3438		9.06250		-0.735109
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17.3438		9.45313		-0.725979
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17.5000		2.57813		-0.908944
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17.5000		2.81250		-0.911320
17.5000		2.89063		-0.910694
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17.5000		3.04688		-0.907443
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17.5781		14.4531		-0.592039
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17.5781		15.0000		-0.583535
17.5781		15.0781		-0.580783
17.5781		15.1563		-0.578282
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